Simple experiment on the sputtering rate of solids in gas discharges
Date
Authors
Hartmann, Peter
Carmona-Reyes, Jorge
Korolov, I.
Matthews, Lorin S.
Hyde, Truell W.
Access rights
Journal Title
Journal ISSN
Volume Title
Publisher
Physics of Plasmas
Abstract
We present a very simple and sensitive method to measure the sputtering rate of solid materials in stationary low-pressure gas discharges. The method is based on the balance of the centrifugal force and the confinement electric force acting on a single electrically charged dust particle in a rotating environment. We demonstrate the use and sensitivity of this method in a capacitively coupled radio frequency argon discharge. We were able to detect a reduction of 10 nm in the diameter of a single dust particle.
Description
Keywords
Citation
Physics of Plasma, 24, 060701, June 2017