Simple experiment on the sputtering rate of solids in gas discharges

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Authors

Hartmann, Peter
Carmona-Reyes, Jorge
Korolov, I.
Matthews, Lorin S.
Hyde, Truell W.

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Physics of Plasmas

Abstract

We present a very simple and sensitive method to measure the sputtering rate of solid materials in stationary low-pressure gas discharges. The method is based on the balance of the centrifugal force and the confinement electric force acting on a single electrically charged dust particle in a rotating environment. We demonstrate the use and sensitivity of this method in a capacitively coupled radio frequency argon discharge. We were able to detect a reduction of 10 nm in the diameter of a single dust particle.

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Physics of Plasma, 24, 060701, June 2017

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