Simple experiment on the sputtering rate of solids in gas discharges

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dc.contributor.authorHartmann, Peter
dc.contributor.authorCarmona-Reyes, Jorge
dc.contributor.authorKorolov, I.
dc.contributor.authorMatthews, Lorin S.
dc.contributor.authorHyde, Truell W.
dc.date.accessioned2018-02-21T16:10:55Z
dc.date.available2018-02-21T16:10:55Z
dc.date.issued2017-06
dc.description.abstractWe present a very simple and sensitive method to measure the sputtering rate of solid materials in stationary low-pressure gas discharges. The method is based on the balance of the centrifugal force and the confinement electric force acting on a single electrically charged dust particle in a rotating environment. We demonstrate the use and sensitivity of this method in a capacitively coupled radio frequency argon discharge. We were able to detect a reduction of 10 nm in the diameter of a single dust particle.en_US
dc.description.keywordscomplex plasmaen_US
dc.description.keywordssputtering rateen_US
dc.identifier.citationPhysics of Plasma, 24, 060701, June 2017en_US
dc.identifier.doi10.1063/1.4985080
dc.identifier.urihttp://hdl.handle.net/2104/10205
dc.language.isoenen
dc.publisherPhysics of Plasmasen_US
dc.titleSimple experiment on the sputtering rate of solids in gas dischargesen_US
dc.typeArticleen

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